A new SPM interferometer for displacement measurement at high velocity

Conference Paper

Publication Date:

1991

CRIS type:

4.1 Contributo in Atti di convegno

List of contributors:

Minoni, Umberto; Docchio, Franco

Handle:

https://iris.unibs.it/handle/11379/33899

Book title:

Proceedings of 37th IIS-ISA91