Effects of plasma non-homogeneity on the physical properties of sputtered thin films
Academic Article
Publication Date:
2001
CRIS type:
1.1 Articolo in rivista
List of contributors:
Rigato, V; Maggioni, G; Patelli, A; Antoni, V; Serianni, G; Spolaore, M; Tramontin, L; Depero, Laura Eleonora; Bontempi, Elza
Published in: