Aluminum nitride SOI Lamb-wave resonators towards multifrequency, multi-sensitive temperature sensor platform

We report a resonant sensor platform based on multi-band Lamb acoustic wave resonators and multiple thermal sensitivities. The demonstrated devices are enabled by a powerful platform which uses aluminum nitride (AlN) on silicon-on-insulator (SOI) substrate that offers process robustness, design flexibility to provide devices with multiple frequencies within the same process, and multiple temperature coefficients of frequency (TCF) that can be tailored to meet the application needs. Symmetric-mode, zeroth-order resonators (S0) with frequencies between 218 MHz and 1.9 GHz, quality factors (Q) up to 2200, and TCFs from - 11.4ppm/°C to -2.5ppm/°C are some of the remarkable features of the platform.